Fluid Measurement & Control| Mass Flow Controller

A mass flow controller automatically controls the flow rate of a gas according to a set flow rate sent as an electric signal, without being affected by use ... Contactus Findus FluidMeasurementandControl ThermalMassFlowmetry HORIBA Products Applications Technology Service Company Contact Technology ElementalAnalysis HealthCare ParticleAnalysis FluidControl MassSpectrometry MicroscopyandImaging Physisorption Spectroscopy SurfacePlasmonResonance Automation FluidControl MassFlowController ThermalMassFlowmetry MassFlowController WhatisaMassFlowController?Amassflowcontrollerautomaticallycontrolstheflowrateofagasaccordingtoasetflowratesentasanelectricsignal,withoutbeingaffectedbyuseconditionsorchangesingaspressure. Flowratescanberoughlyclassifiedintotwotypes:volumetricflowandmassflow. Avolumetricflowmeasurementisaffectedbyambienttemperatureandpressure. Toseethetrueflow,thepressureandtemperatureconditionsneedtobepressureconditions,therforeprovidingmuchmoreaccurateandstableflowmeasurementandcontrol. Ourmassflowcontrollersareusedinawiderangeofindustrialfieldsasindispensableequipmentwhenaccuratecontrolofflowratesisrequiredoranautomatedproductionlineisbuilt. StructureandoperatingprinciplesThesemassflowcontrollershaveaflowratemeasurementsectionthatincludesasensor,bypass,flowratecontrolvalve,andspecialcircuitry.ThegasisinputfromanInletjoint,andisdividedsothatitflowsoverboththeflowratesensorandabypass.Thesensormeasuresthemassflowrateofthegas,andtheflowratecontrolvalvemodifiestheflowratesothatthedifferencebetweenthemeasuredflowrateandtheflowratereceivedfromtheexternalflowratesettingsignalis0(zero).Theunitsfeaturealoopcircuit,soevenifthereisasecondarypressurechangeorambienttemperaturechangethatcouldaffectthesupplypressureoftheintroducedgas,theflowrateisinstantaneouslycorrected,whichensuresstableflowratecontrol. OperatingPrincipleThegas,whichentersfromtheinlet,firstsplitstoflowpastthesensororthroughthebypass.Atthesensor,themassflowrateisdetectedasaproportionalchangeintemperatureandconvertedbythebridgecircuitstoanelectricalsignal.Thissignalpassesthroughtheamplificationandcorrectioncircuits,andisoutputasalinearvoltagebetween0to5V. Atthesametime,itisalsosenttothecomparisoncontrolcircuits.Thecomparisoncontrolcircuitcomparestheflowratesettingsignalandtheacutualflowsettingsignalfromthesensorandsendsadifferencesignaltothevalvedrivingcircuit.Theflowratecontrolvalvemoversasappropriatetomakethedifferencebetweenthereguiredflowsetpointandflowoutputsignalsapproachzero. Inotherwords,theunitcontrolstheflowsothatitisalwaysatthesetflowrate. ProductcharacteristicofDigitalMassFlowControllerTheDigitalMassFlowControllerisshowninthediagramabove.Thesemassflowcontrollershaveaflowratemeasurementsectionthatincludesasensor,bypass,flowratecontrolvalve,andspecialcircuitry.ACPUispartofthecircuitry,whichmakesitbothmulti-functionalandhighlyefficient.Theunitsfeaturealoopcircuit,soevenifthereisasecondarypressurechangeorambienttemperaturechangethatcouldaffectthesupplypressureoftheintroducedgas,theflowrateisinstantaneouslycorrected,whichensuresstableflowratecontrol. LiquidMassFlowControl-MeasurementPrinciplesCoolingmeasurementmethodTheflowratesensorintheLF-F/LV-Fseriesoffinemassflowcontrollersforliquidsconsistsofanelectroniccoolingelement(Peltierelement)thatisincontactwithacapillarytube,aswellasseveraltemperaturedetectionelements.Whentheliquidisflowing,thesensordetectsthetemperaturerise(⊗T)correspondingtotheflowrateanddisplaysitasaflowrate.Unlikemethodswhereheatisadded,thiscoolingmethodenablesflowratemeasurementofliquidswithlowboilingpoints.Italsopreventsproblemswithinterferenceduetotheinfluenceofsecondarydischarge(vaporization)andmakesaccurateflowratemeasurementspossible.Structure/OperatingprincipleTheLV-FseriesofmassflowcontrollersaresimilartotheLF-Fseriesofmassflowmeters,butalsohaveapiezoactuatorvalveandaninternalcomparisoncontrolcircuit.Theycomparetheflowratesettingsignalandtheflowrateoutputsignalandautomaticallycontrolthevalveaperturesothatthetwosignalswillmatch.Sincetheyuseafeedbackcontrolsystem,therearenoflowratevariationsasaresultofexternalfactors,and,therefore,stable,accuratecontrolispossible.Theuseofapiezoactuatorvalve,whichisbothstableanddoesnotgenerateheat,asthecontrolvalvemakestheseunitsidealforflowcontrolofliquidswithlowboilingpoints. LiquidSourceVaporizationControlSystems-PrincipleofVaporizationInjectionmethodThefollowinglistcoversthemajorstepsinvolvedinvaporizingaliquidsourceandsupplyingittotheprocesschamber.1.Theliquidsource'sflowrateismeasuredandtheamountofliquidisfeedbackcontrolledbythevalve.2.Theliquidisinstantaneouslyandcompletelyvaporized.3.Thegasisreleasedwithoutbeingallowedtocondensebackintoitsliquidform.Vaporizationsystemsthatusetheinjectionmethodsequentiallycarryoutsteps1,2,and3listedabove.TheVCseriesunitsmeasuretheliquidflowoftheliquidsourceusingamassflowmeteranddonotuseacarriergas. TheMI/MVseriesunitsuseamassflowmeterformeasurementandfeatureamassflowcontrollerthatintroducesacarriergasintotheunittovaporizetheliquidsource.   GasandliquidmixturemethodThisisthevaporizationmethodusedintheMI/MVseries.Sincethepressureonthecarriergasishigheratthefrontofthenozzleinsidetheinjector,itcanbeheatedefficiently.Theliquidsourceandtheheatedcarriergasaremixedtogetherinthegas/liquidmixingareainthefrontofthenozzle,andthepressureisreducedastheypassthroughthenozzle,vaporizingthemixture.Vaporizationefficiencyishigherthanwithtraditionalvaporizationmethods.Whenthismethodisused,largerflowscanbegenerated,andthegenerationtemperaturecanbereduced. 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