Mass flow controller - Wikipedia

A mass flow controller (MFC) is a device used to measure and control the flow of liquids and gases. ... A mass flow controller is designed and calibrated to ... Massflowcontroller FromWikipedia,thefreeencyclopedia Jumptonavigation Jumptosearch Thisarticleneedsadditionalcitationsforverification.Pleasehelpimprovethisarticlebyaddingcitationstoreliablesources.Unsourcedmaterialmaybechallengedandremoved.Findsources: "Massflowcontroller" – news ·newspapers ·books ·scholar ·JSTOR(September2018)(Learnhowandwhentoremovethistemplatemessage) Internalblockdiagram Amassflowcontroller(MFC)isadeviceusedtomeasureandcontroltheflowofliquidsandgases.[1]Amassflowcontrollerisdesignedandcalibratedtocontrolaspecifictypeofliquidorgasataparticularrangeofflowrates.TheMFCcanbegivenasetpointfrom0to100%ofitsfullscalerangebutistypicallyoperatedinthe10to90%offullscalewherethebestaccuracyisachieved.Thedevicewillthencontroltherateofflowtothegivensetpoint.MFCscanbeeitheranalogordigital.Adigitalflowcontrollerisusuallyabletocontrolmorethanonetypeoffluidwhereasananalogcontrollerislimitedtothefluidforwhichitwascalibrated. Allmassflowcontrollershaveaninletport,anoutletport,amassflowsensorandaproportionalcontrolvalve.TheMFCisfittedwithaclosedloopcontrolsystemwhichisgivenaninputsignalbytheoperator(oranexternalcircuit/computer)thatitcomparestothevaluefromthemassflowsensorandadjuststheproportionalvalveaccordinglytoachievetherequiredflow.TheflowrateisspecifiedasapercentageofitscalibratedfullscaleflowandissuppliedtotheMFCasavoltagesignal. Massflowcontrollersrequirethesupplygasorliquidtobewithinaspecificpressurerange.LowpressurewillstarvetheMFCoffluidandcauseittofailtoachieveitssetpoint.Highpressuremaycauseerraticflowrates.Therearemanydifferenttechnologieswhichcanhelptomeasuretheflowofthefluidsandeventuallyhelpincontrollingflow.ThosetechnologiesdefinethetypesofMassFlowControllers,andtheyincludedifferentialpressure(ΔP),differentialtemperature(ΔT),Coriolis,Ultrasonic,electromagnetic,turbine,etc. Seealso[edit] Controlvalve Coriolis Flowcontrolvalve Flowlimiter Flowmeasurement Massflowmeter Thermalmassflowmeter Massflowrate References[edit] ^Tison,S.A.(1996)."Acriticalevaluationofthermalmassflowmeters"(PDF).JournalofVacuumScience&TechnologyA:Vacuum,Surfaces,andFilms.14(4):2582–2591.Bibcode:1996JVSTA..14.2582T.doi:10.1116/1.579985.ISSN 0734-2101.S2CID 39546958.Archivedfromtheoriginal(PDF)on2019-03-02. Externallinks[edit] HowaMassFlowControllerworksvideo ThermalMassFlowMeter/Controller(Principleofoperation)video MEMS-basedthermalmassflowcontrollervideo Retrievedfrom"https://en.wikipedia.org/w/index.php?title=Mass_flow_controller&oldid=1085290099" Categories:MeasuringinstrumentsControldevicesHiddencategories:ArticlesneedingadditionalreferencesfromSeptember2018Allarticlesneedingadditionalreferences Navigationmenu Personaltools NotloggedinTalkContributionsCreateaccountLogin Namespaces ArticleTalk English Views ReadEditViewhistory More Search Navigation MainpageContentsCurrenteventsRandomarticleAboutWikipediaContactusDonate Contribute HelpLearntoeditCommunityportalRecentchangesUploadfile Tools WhatlinkshereRelatedchangesUploadfileSpecialpagesPermanentlinkPageinformationCitethispageWikidataitem Print/export DownloadasPDFPrintableversion Languages العربيةBosanskiDeutschفارسیFrançais한국어日本語 Editlinks